Data set 01
1999 Philips 0-D
Published operating points and test conditions from this source.
Sensor
Characteristics
Usable partial-pressure range
1e-11 to 1e-10 torr
Magnetic induction example
0.4 Wb/m2
RF frequency relation
f = 15.33e6 * B / M Hz
Other
Recommended filament voltage range
0 to 2 V
RF voltage range
1 to 5 V RMS
Grid-to-box D voltage
-990 V
Electron collector voltage
-80 V
Box D voltage range
0 to 40 V
Ion collector voltage range
-10 to 10 mV
RF generator frequency range formula
60e3*B to 16000e3*B Hz
Maximum recommended electrode cleaning temperature
800 degC
Pressure<1e-9torr
